Planar Targets

Planar Monolithic

Available in many materials. Shown here are Aluminum, Copper, and Brass.

Aluminum, copper, and brass planar sputtering targets

Planar Bonded

This example: SiAl tiles on copper backing plate bonded with indium

Si/Al bonded sputtering target

Custom-bonded

This example: Lithium target on copper backing plate

Small lithium planar sputtering target