Specialty Sputtering Cathodes
Planar Sputtering Cathodes
These cathodes include a stainless steel cooling plate, acetal or PEEK main insulator, and a high strength magnet assembly. An aluminum adapter flange is optional and can be fitted to your coater.
Cooling Plate Body
The cooling plate body is made of stainless steel for strength, rigidity and durability. A copper face is vacuum brazed on for a water-tight seal. A magnetic shunt is brazed into the cooling plate face to help improve target utilization.
Cathode Components
Shown here, from top to bottom are, magnet assembly, cooling plate, insulator, adapter flange.
Finished Cathodes
Shown here are 4 sputtering cathodes in a steel-lined crate ready for shipment. The steel lining is required for the packing to meet ATA shipping requirements for components with permanent magnets.
